Comprehensive analysis of piezoresistive, capacitive, and piezoelectric sensing.
: Applications are evaluated against commercial requirements, including a full chapter on MEMS economics, yield, and cost analysis. Amazon.com Key Technical Topics
where ( A ) is plate area, ( d ) gap. Kaajakari highlights to cancel common-mode noise and nonlinearity.
To get 1 mV/g, you need a change in capacitance (ΔC). Kaajakari provides the differential capacitance formula for a moving plate between two fixed plates. The PDF work here involves calculating the parasitic capacitance of the interconnect lines—a detail 90% of beginners forget. His rule: Keep sense lines as short as possible; use a "guard ring" to shield parasitic signals.
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This is where most student designs fail. A MEMS device that works in a vacuum may not work in air.
When mechanical elements shrink to the micron scale, Johnson-Nyquist thermal agitation causes structural vibration. In his specialized tutorial on Mechanical Noise , Kaajakari models how thermal noise influences device resolution.